Development of a Cryogenic EBID Method for Fabricating Nanowires using a W(CO)6 Precursor

This thesis presents a detailed study into the development of a custom- made cryogenic sample stage which was designed, fabricated, and retrofitted in a Scanning Electron Microscope (SEM) for performing Cryo-EBID, a cryogenic variation of the microfabrication technique known as ’Electron Beam Induced Deposition’ (EBID). It provides an overview of all relevant aspects of the design process, from the concept design to a fully integrated and functional product. The goal of the project is to implement Cryo-EBID for the fabrication of nanowires using a tungsten hexacarbonyl (W(CO)6) precursor, offering an immense increase in deposition rate compared to traditional EBID. The setup’s efficacy in creating microstructures is eval- uated at various electron doses and a small set of prototype nanowires were fabricated and characterized. This project serves to provide valuable insights into the development process of a cryogenic sample stage and a method for creating nanowires using cryo-EBID...Show moreThis thesis presents a detailed study into the development of a custom- made cryogenic sample stage which was designed, fabricated, and retrofitted in a Scanning Electron Microscope (SEM) for performing Cryo-EBID, a cryogenic variation of the microfabrication technique known as ’Electron Beam Induced Deposition’ (EBID). It provides an overview of all relevant aspects of the design process, from the concept design to a fully integrated and functional product. The goal of the project is to implement Cryo-EBID for the fabrication of nanowires using a tungsten hexacarbonyl (W(CO)6) precursor, offering an immense increase in deposition rate compared to traditional EBID. The setup’s efficacy in creating microstructures is eval- uated at various electron doses and a small set of prototype nanowires were fabricated and characterized. This project serves to provide valuable insights into the development process of a cryogenic sample stage and a method for creating nanowires using cryo-EBID while also setting the stage for future cryo-EBID experiments.Show less

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Development of a Cryogenic EBID Method for Fabricating Nanowires using a W(CO)6 Precursor