Diffraction distortion in LEEM diffraction imaging makes it impossible to measure angles and distances accurately. In a LEEM this diffraction distortion changes when the sample measured is changed...Show moreDiffraction distortion in LEEM diffraction imaging makes it impossible to measure angles and distances accurately. In a LEEM this diffraction distortion changes when the sample measured is changed meaning it needs to be corrected each time. In this thesis the method for an in-place correction is explained and applied. The method successfully allows the measurement of angles and distances without requiring the measurement of too much data. However, it can still be improved upon so that less data is needed and a better correction is acquired.Show less