This thesis presents a detailed study into the development of a custom- made cryogenic sample stage which was designed, fabricated, and retrofitted in a Scanning Electron Microscope (SEM) for...Show moreThis thesis presents a detailed study into the development of a custom- made cryogenic sample stage which was designed, fabricated, and retrofitted in a Scanning Electron Microscope (SEM) for performing Cryo-EBID, a cryogenic variation of the microfabrication technique known as ’Electron Beam Induced Deposition’ (EBID). It provides an overview of all relevant aspects of the design process, from the concept design to a fully integrated and functional product. The goal of the project is to implement Cryo-EBID for the fabrication of nanowires using a tungsten hexacarbonyl (W(CO)6) precursor, offering an immense increase in deposition rate compared to traditional EBID. The setup’s efficacy in creating microstructures is eval- uated at various electron doses and a small set of prototype nanowires were fabricated and characterized. This project serves to provide valuable insights into the development process of a cryogenic sample stage and a method for creating nanowires using cryo-EBID while also setting the stage for future cryo-EBID experiments.Show less
Focused electron-beam induced deposition (FEBID) is a non-destructive, relatively fast and cheap method with applications in AFM, plasmonics and nanomagnetics amongst others. In this thesis, three...Show moreFocused electron-beam induced deposition (FEBID) is a non-destructive, relatively fast and cheap method with applications in AFM, plasmonics and nanomagnetics amongst others. In this thesis, three dimensional superconducting arches were fabricated using this technique with the help of a computer aided design (CAD) program. Magnetic field sweeps were performed at low temperatures (∼2-5 K) to characterize these arches. With a few improvements, more complex 3D structures can be fabricated, paving the way towards the numerous applications people now can only dream of.Show less
In this work, we use electron-beam-induced deposition (EBID) to create superconducting structures. This is then applied in the fabrication of superconducting devices, which are characterized in low...Show moreIn this work, we use electron-beam-induced deposition (EBID) to create superconducting structures. This is then applied in the fabrication of superconducting devices, which are characterized in low-temperature experiments.Show less
