Crystalline pentacene layers can be damaged when exposed to low energy electrons. Using the Low Energy Electron Microscope this damage is researched. By analyzing the fading of the Low Energy...Show moreCrystalline pentacene layers can be damaged when exposed to low energy electrons. Using the Low Energy Electron Microscope this damage is researched. By analyzing the fading of the Low Energy Electron Diffraction (LEED) pattern of the layers the structural damage is quantified. Multiple techniques of analyzing the data are compared where a k-space filtering technique all-round gave the best results in dealing with the background. In one dataset, the height of the diffraction peaks decreases and their width broadens with increasing dose. In another dataset, the height decays exponentially and the width remains almost constant. In the data analyzed a threshold for damage to occur is found at an electron energy of around 6 eV. Damage in crystalline layers also simulated and compared to the experiments in LEEM.Show less