In this thesis we present and scrutinize a technique to reconstruct the surface profile of a sample using a low energy electron microscope (LEEM). This technique is added to the rich catalogue of...Show moreIn this thesis we present and scrutinize a technique to reconstruct the surface profile of a sample using a low energy electron microscope (LEEM). This technique is added to the rich catalogue of surface analysis techniques available in LEEM.We demonstrate that the surface profile of a sample can be deduced from the local tilt angles. This is done by studying the change in diffraction pattern. The procedure is then applied to two samples: a flake of MoTe2 that has a bump on it and a flake of MoTe2 that has collapsed into a trench. We show that we can correct for lensing effects that are introduced due to a non-flat surface. In these samples we determine the local tilt angle with an accuracy of 0.3°.Show less